Moems - Mems 2006 2006

نویسنده

  • Albert K. Henning
چکیده

Devices/Applications/Reliability 6111 Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS V (Tanner/Ramesham) 6112 Microfluidics, BioMEMS, and Medical Microsystems IV (Papautsky/Wang/Vauchier) 6113 MEMS/MOEMS Components and Their Applications III (Olivier/Tadigadapa/Henning) 6114 MOEMS, Display, Imaging, and Miniaturized Microsystems IV (Ürey/Dickensheets/Gogoi) Founding Chair M. Edward Motamedi, Revoltech Microsystems

برای دانلود متن کامل این مقاله و بیش از 32 میلیون مقاله دیگر ابتدا ثبت نام کنید

ثبت نام

اگر عضو سایت هستید لطفا وارد حساب کاربری خود شوید

منابع مشابه

Novel Bonding technologies for wafer-level transparent packaging of MOEMS

Packaging costs of Micro-Electro-Mechanical System (MEMS) are still contributing with >50% to the total costs of most devices. Aligned wafer bonding techniques for Wafer-level packaging (WLP) demonstrates a huge potential to reduce these costs due to a smaller size of the total package, improved performance and shorter time to market. A special group of MEMS devices, Micro-OptoElectro-Mechanica...

متن کامل

Laser micromachining for manufacturing MEMS devices

Applications of laser micromachining to the manufacture and prototyping of MEMS and MOEMS devices are presented. Examples of microturbines, biofactory on a chip, microfluidic components and microoptical elements manufactured by laser micromachining are described.

متن کامل

Mechanical tuning of two-dimensional photonic crystal cavity by micro Electro mechanical flexures

A nano-displacement sensing method for micro-opto-electro-mechanical-systems (MOEMS) is proposed. The method is based on a square attice photonic crystal (PC) made of dielectric silicon posts, mounted on a micro mechanical flexure. The flexure is fixed at one end and is free to ove at the other, to enable elastic deformations that, by being transferred to the photonic crystal array, modify its ...

متن کامل

Novel Applications of MOEMS Display and Imaging

Significant progresses have been made in MOEMS for display, imaging, telecommunication, and bioinstrumentation applications. This talk will first provide an overview of the recent advances in micromirror technologies. Then it will discuss three novel applications using MEMS micromirrors. First, a large port count wavelength-selective switch using a one-dimensional array of two-axis analog micro...

متن کامل

Integration of Micro-Electro-Mechanical Deformable Mirrors in Doped Fiber Amplifiers

We present a simple technique to produce active Qswitching in various types of fiber amplifiers by active integration of an electrostatic actuated deformable metallic micro-mirror. The optical MEMS (MOEMS) device acts as one of the laser cavity reflectors and, at the same time, as switching/ modulator element. We aim to obtain laser systems emitting short, high-power pulses and having variable ...

متن کامل

ذخیره در منابع من


  با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید

برای دانلود متن کامل این مقاله و بیش از 32 میلیون مقاله دیگر ابتدا ثبت نام کنید

ثبت نام

اگر عضو سایت هستید لطفا وارد حساب کاربری خود شوید

عنوان ژورنال:

دوره   شماره 

صفحات  -

تاریخ انتشار 2006